5

Model of silicon epitaxial growth in SiCl4-HCl-H2 system based on flow graph

Year:
1979
Language:
english
File:
PDF, 685 KB
english, 1979
6

Flow-graph model of epitaxial growth of AIIIBV compounds from the vapour phase

Year:
1979
Language:
english
File:
PDF, 690 KB
english, 1979
8

A general model of the chemical vapour deposition process I: Theory

Year:
1980
Language:
english
File:
PDF, 973 KB
english, 1980
9

Silicon-on-insulator technology for high-temperature, smart-power applications

Year:
1995
Language:
english
File:
PDF, 538 KB
english, 1995
10

Deposition of polysilicon as an example of a pyrolytic CVD process

Year:
1980
Language:
english
File:
PDF, 704 KB
english, 1980